id	author	title	date	pages	extension	mime	words	sentence	flesch	summary	cache	txt
0g354f1841c	Jie Su	A Lateral-Drive Method to Address Pull-in Failure in MEMS	2008		.txt	text/plain	238	14	42	This dissertation investigates an effective lateral-drive method to solve this pull-in problem by building electrodes laterally offset rather than directly opposite to each other. Lateral gap less than a critical value are still susceptible to the pull-in problem.	cache/0g354f1841c.txt	txt/0g354f1841c.txt