id	author	title	date	pages	extension	mime	words	sentence	flesch	summary	cache	txt
6w924b3193s	Zoltá n Rá cz	Piezoflexure-enabled nanofabrication using translated stencil masks	2007		.txt	text/plain	366	15	38	Arrays of Al/AlxOy/Ge metal-oxide-semiconductor (MOS) structures deposited with varying evaporation conditions have been formed for rapid material characterization. In the PEN approach, a deposition substrate is translated under a stencil mask in an electron-beam evaporator between depositions of dissimilar materials.	cache/6w924b3193s.txt	txt/6w924b3193s.txt