id sid tid token lemma pos 7m01bk1486r 1 1 microelectromechanical microelectromechanical ADJ 7m01bk1486r 1 2 systems system NOUN 7m01bk1486r 1 3 ( ( PUNCT 7m01bk1486r 1 4 mems mem NOUN 7m01bk1486r 1 5 ) ) PUNCT 7m01bk1486r 1 6 is be AUX 7m01bk1486r 1 7 a a DET 7m01bk1486r 1 8 burgeoning burgeon VERB 7m01bk1486r 1 9 field field NOUN 7m01bk1486r 1 10 , , PUNCT 7m01bk1486r 1 11 and and CCONJ 7m01bk1486r 1 12 the the DET 7m01bk1486r 1 13 next next ADJ 7m01bk1486r 1 14 stage stage NOUN 7m01bk1486r 1 15 of of ADP 7m01bk1486r 1 16 development development NOUN 7m01bk1486r 1 17 is be AUX 7m01bk1486r 1 18 predicted predict VERB 7m01bk1486r 1 19 to to PART 7m01bk1486r 1 20 be be AUX 7m01bk1486r 1 21 the the DET 7m01bk1486r 1 22 integration integration NOUN 7m01bk1486r 1 23 of of ADP 7m01bk1486r 1 24 microsensors microsensor NOUN 7m01bk1486r 1 25 , , PUNCT 7m01bk1486r 1 26 actuators actuator NOUN 7m01bk1486r 1 27 and and CCONJ 7m01bk1486r 1 28 circuits circuit NOUN 7m01bk1486r 1 29 on on ADP 7m01bk1486r 1 30 a a DET 7m01bk1486r 1 31 single single ADJ 7m01bk1486r 1 32 silicon silicon NOUN 7m01bk1486r 1 33 chip chip NOUN 7m01bk1486r 1 34 . . PUNCT 7m01bk1486r 2 1 such such ADJ 7m01bk1486r 2 2 microsystems microsystem NOUN 7m01bk1486r 2 3 will will AUX 7m01bk1486r 2 4 bring bring VERB 7m01bk1486r 2 5 about about ADP 7m01bk1486r 2 6 revolutionary revolutionary ADJ 7m01bk1486r 2 7 advancement advancement NOUN 7m01bk1486r 2 8 in in ADP 7m01bk1486r 2 9 many many ADJ 7m01bk1486r 2 10 fields field NOUN 7m01bk1486r 2 11 , , PUNCT 7m01bk1486r 2 12 especially especially ADV 7m01bk1486r 2 13 for for ADP 7m01bk1486r 2 14 implantable implantable ADJ 7m01bk1486r 2 15 , , PUNCT 7m01bk1486r 2 16 autonomous autonomous ADJ 7m01bk1486r 2 17 applications application NOUN 7m01bk1486r 2 18 . . PUNCT 7m01bk1486r 3 1 however however ADV 7m01bk1486r 3 2 , , PUNCT 7m01bk1486r 3 3 when when SCONJ 7m01bk1486r 3 4 freeing free VERB 7m01bk1486r 3 5 the the DET 7m01bk1486r 3 6 chip chip NOUN 7m01bk1486r 3 7 from from ADP 7m01bk1486r 3 8 wire wire NOUN 7m01bk1486r 3 9 tethering tether VERB 7m01bk1486r 3 10 , , PUNCT 7m01bk1486r 3 11 one one NUM 7m01bk1486r 3 12 major major ADJ 7m01bk1486r 3 13 obstacle obstacle NOUN 7m01bk1486r 3 14 is be AUX 7m01bk1486r 3 15 the the DET 7m01bk1486r 3 16 powering power VERB 7m01bk1486r 3 17 needs need NOUN 7m01bk1486r 3 18 of of ADP 7m01bk1486r 3 19 mems mem NOUN 7m01bk1486r 3 20 devices device NOUN 7m01bk1486r 3 21 , , PUNCT 7m01bk1486r 3 22 mainly mainly ADV 7m01bk1486r 3 23 microactuators microactuator NOUN 7m01bk1486r 3 24 , , PUNCT 7m01bk1486r 3 25 which which PRON 7m01bk1486r 3 26 are be AUX 7m01bk1486r 3 27 dramatically dramatically ADV 7m01bk1486r 3 28 different different ADJ 7m01bk1486r 3 29 from from ADP 7m01bk1486r 3 30 those those PRON 7m01bk1486r 3 31 of of ADP 7m01bk1486r 3 32 cmos cmos PROPN 7m01bk1486r 3 33 integrated integrate VERB 7m01bk1486r 3 34 circuit circuit NOUN 7m01bk1486r 3 35 ( ( PUNCT 7m01bk1486r 3 36 ic ic NOUN 7m01bk1486r 3 37 ) ) PUNCT 7m01bk1486r 3 38 chips chip NOUN 7m01bk1486r 3 39 . . PUNCT 7m01bk1486r 4 1 here here ADV 7m01bk1486r 4 2 we we PRON 7m01bk1486r 4 3 demonstrate demonstrate VERB 7m01bk1486r 4 4 that that SCONJ 7m01bk1486r 4 5 inductive inductive ADJ 7m01bk1486r 4 6 links link NOUN 7m01bk1486r 4 7 with with ADP 7m01bk1486r 4 8 integrated integrate VERB 7m01bk1486r 4 9 receiving receiving NOUN 7m01bk1486r 4 10 coils coil NOUN 7m01bk1486r 4 11 can can AUX 7m01bk1486r 4 12 provide provide VERB 7m01bk1486r 4 13 sufficient sufficient ADJ 7m01bk1486r 4 14 voltage voltage NOUN 7m01bk1486r 4 15 or or CCONJ 7m01bk1486r 4 16 power power NOUN 7m01bk1486r 4 17 to to ADP 7m01bk1486r 4 18 many many ADJ 7m01bk1486r 4 19 mems mem NOUN 7m01bk1486r 4 20 devices device NOUN 7m01bk1486r 4 21 . . PUNCT 7m01bk1486r 5 1 to to PART 7m01bk1486r 5 2 further far ADV 7m01bk1486r 5 3 improve improve VERB 7m01bk1486r 5 4 the the DET 7m01bk1486r 5 5 performance performance NOUN 7m01bk1486r 5 6 of of ADP 7m01bk1486r 5 7 the the DET 7m01bk1486r 5 8 inductive inductive ADJ 7m01bk1486r 5 9 link link NOUN 7m01bk1486r 5 10 , , PUNCT 7m01bk1486r 5 11 an an DET 7m01bk1486r 5 12 inlaid inlaid ADJ 7m01bk1486r 5 13 electroplating electroplating NOUN 7m01bk1486r 5 14 procedure procedure NOUN 7m01bk1486r 5 15 is be AUX 7m01bk1486r 5 16 developed develop VERB 7m01bk1486r 5 17 to to PART 7m01bk1486r 5 18 reduce reduce VERB 7m01bk1486r 5 19 the the DET 7m01bk1486r 5 20 internal internal ADJ 7m01bk1486r 5 21 resistance resistance NOUN 7m01bk1486r 5 22 of of ADP 7m01bk1486r 5 23 integrated integrated ADJ 7m01bk1486r 5 24 receiving receiving NOUN 7m01bk1486r 5 25 coils coil NOUN 7m01bk1486r 5 26 . . PUNCT 7m01bk1486r 6 1 trenches trench NOUN 7m01bk1486r 6 2 into into ADP 7m01bk1486r 6 3 si si PROPN 7m01bk1486r 6 4 substrates substrate NOUN 7m01bk1486r 6 5 by by ADP 7m01bk1486r 6 6 deep deep ADJ 7m01bk1486r 6 7 reactive reactive ADJ 7m01bk1486r 6 8 ion ion NOUN 7m01bk1486r 6 9 etching etching NOUN 7m01bk1486r 6 10 ( ( PUNCT 7m01bk1486r 6 11 drie drie ADJ 7m01bk1486r 6 12 ) ) PUNCT 7m01bk1486r 6 13 are be AUX 7m01bk1486r 6 14 used use VERB 7m01bk1486r 6 15 as as ADP 7m01bk1486r 6 16 electroplating electroplating NOUN 7m01bk1486r 6 17 molds mold NOUN 7m01bk1486r 6 18 , , PUNCT 7m01bk1486r 6 19 and and CCONJ 7m01bk1486r 6 20 copper copper NOUN 7m01bk1486r 6 21 coils coil NOUN 7m01bk1486r 6 22 of of ADP 7m01bk1486r 6 23 centimeter centimeter ADJ 7m01bk1486r 6 24 side side NOUN 7m01bk1486r 6 25 length length NOUN 7m01bk1486r 6 26 and and CCONJ 7m01bk1486r 6 27 up up ADP 7m01bk1486r 6 28 to to PART 7m01bk1486r 6 29 100 100 NUM 7m01bk1486r 6 30 µ µ PRON 7m01bk1486r 6 31 m m NOUN 7m01bk1486r 6 32 in in ADP 7m01bk1486r 6 33 height height NOUN 7m01bk1486r 6 34 and and CCONJ 7m01bk1486r 6 35 10 10 NUM 7m01bk1486r 6 36 µ µ NOUN 7m01bk1486r 6 37 m m NOUN 7m01bk1486r 6 38 in in ADP 7m01bk1486r 6 39 width width NOUN 7m01bk1486r 6 40 are be AUX 7m01bk1486r 6 41 electroplated electroplate VERB 7m01bk1486r 6 42 . . PUNCT 7m01bk1486r 7 1 enhanced enhanced ADJ 7m01bk1486r 7 2 outputs output NOUN 7m01bk1486r 7 3 are be AUX 7m01bk1486r 7 4 obtained obtain VERB 7m01bk1486r 7 5 for for ADP 7m01bk1486r 7 6 inductive inductive ADJ 7m01bk1486r 7 7 links link NOUN 7m01bk1486r 7 8 with with ADP 7m01bk1486r 7 9 micromachined micromachined ADJ 7m01bk1486r 7 10 microcoils microcoil NOUN 7m01bk1486r 7 11 . . PUNCT 7m01bk1486r 8 1 another another DET 7m01bk1486r 8 2 application application NOUN 7m01bk1486r 8 3 involves involve VERB 7m01bk1486r 8 4 transmission transmission NOUN 7m01bk1486r 8 5 of of ADP 7m01bk1486r 8 6 long long ADJ 7m01bk1486r 8 7 - - PUNCT 7m01bk1486r 8 8 duration duration NOUN 7m01bk1486r 8 9 pulse pulse NOUN 7m01bk1486r 8 10 trains train NOUN 7m01bk1486r 8 11 onto onto ADP 7m01bk1486r 8 12 an an DET 7m01bk1486r 8 13 implantable implantable NOUN 7m01bk1486r 8 14 receiving receiving NOUN 7m01bk1486r 8 15 coil coil NOUN 7m01bk1486r 8 16 . . PUNCT 7m01bk1486r 9 1 some some DET 7m01bk1486r 9 2 medical medical ADJ 7m01bk1486r 9 3 conditions condition NOUN 7m01bk1486r 9 4 , , PUNCT 7m01bk1486r 9 5 such such ADJ 7m01bk1486r 9 6 as as ADP 7m01bk1486r 9 7 parkinsonåáå_s parkinsonåáå_s NOUN 7m01bk1486r 9 8 disease disease NOUN 7m01bk1486r 9 9 , , PUNCT 7m01bk1486r 9 10 already already ADV 7m01bk1486r 9 11 benefit benefit VERB 7m01bk1486r 9 12 from from ADP 7m01bk1486r 9 13 such such ADJ 7m01bk1486r 9 14 pulse pulse ADJ 7m01bk1486r 9 15 trains train NOUN 7m01bk1486r 9 16 for for ADP 7m01bk1486r 9 17 deep deep ADJ 7m01bk1486r 9 18 brain brain NOUN 7m01bk1486r 9 19 stimulation stimulation NOUN 7m01bk1486r 9 20 ( ( PUNCT 7m01bk1486r 9 21 dbs dbs ADV 7m01bk1486r 9 22 ) ) PUNCT 7m01bk1486r 9 23 generated generate VERB 7m01bk1486r 9 24 by by ADP 7m01bk1486r 9 25 a a DET 7m01bk1486r 9 26 wired wire VERB 7m01bk1486r 9 27 link link NOUN 7m01bk1486r 9 28 . . PUNCT 7m01bk1486r 10 1 wireless wireless ADJ 7m01bk1486r 10 2 transmission transmission NOUN 7m01bk1486r 10 3 of of ADP 7m01bk1486r 10 4 the the DET 7m01bk1486r 10 5 pulses pulses NOUN 7m01bk1486r 10 6 is be AUX 7m01bk1486r 10 7 challenging challenge VERB 7m01bk1486r 10 8 due due ADP 7m01bk1486r 10 9 to to ADP 7m01bk1486r 10 10 the the DET 7m01bk1486r 10 11 small small ADJ 7m01bk1486r 10 12 time time NOUN 7m01bk1486r 10 13 constant constant ADJ 7m01bk1486r 10 14 of of ADP 7m01bk1486r 10 15 the the DET 7m01bk1486r 10 16 inductive inductive ADJ 7m01bk1486r 10 17 link link NOUN 7m01bk1486r 10 18 . . PUNCT 7m01bk1486r 11 1 using use VERB 7m01bk1486r 11 2 amplitude amplitude NOUN 7m01bk1486r 11 3 modulation modulation NOUN 7m01bk1486r 11 4 , , PUNCT 7m01bk1486r 11 5 we we PRON 7m01bk1486r 11 6 successfully successfully ADV 7m01bk1486r 11 7 retrieve retrieve VERB 7m01bk1486r 11 8 pulse pulse ADJ 7m01bk1486r 11 9 trains train NOUN 7m01bk1486r 11 10 from from ADP 7m01bk1486r 11 11 a a DET 7m01bk1486r 11 12 receiving receive VERB 7m01bk1486r 11 13 coil coil NOUN 7m01bk1486r 11 14 with with ADP 7m01bk1486r 11 15 a a DET 7m01bk1486r 11 16 passive passive ADJ 7m01bk1486r 11 17 envelope envelope NOUN 7m01bk1486r 11 18 detector detector NOUN 7m01bk1486r 11 19 , , PUNCT 7m01bk1486r 11 20 and and CCONJ 7m01bk1486r 11 21 electroplated electroplate VERB 7m01bk1486r 11 22 coils coil NOUN 7m01bk1486r 11 23 provide provide VERB 7m01bk1486r 11 24 improved improved ADJ 7m01bk1486r 11 25 performance performance NOUN 7m01bk1486r 11 26 . . PUNCT 7m01bk1486r 12 1 for for ADP 7m01bk1486r 12 2 either either DET 7m01bk1486r 12 3 application application NOUN 7m01bk1486r 12 4 , , PUNCT 7m01bk1486r 12 5 the the DET 7m01bk1486r 12 6 output output NOUN 7m01bk1486r 12 7 from from ADP 7m01bk1486r 12 8 the the DET 7m01bk1486r 12 9 integrated integrated ADJ 7m01bk1486r 12 10 coil coil NOUN 7m01bk1486r 12 11 is be AUX 7m01bk1486r 12 12 enhanced enhance VERB 7m01bk1486r 12 13 at at ADP 7m01bk1486r 12 14 a a DET 7m01bk1486r 12 15 resonant resonant ADJ 7m01bk1486r 12 16 frequency frequency NOUN 7m01bk1486r 12 17 intrinsic intrinsic ADJ 7m01bk1486r 12 18 to to ADP 7m01bk1486r 12 19 the the DET 7m01bk1486r 12 20 inductive inductive ADJ 7m01bk1486r 12 21 link link NOUN 7m01bk1486r 12 22 . . PUNCT 7m01bk1486r 13 1 selective selective ADJ 7m01bk1486r 13 2 driving driving NOUN 7m01bk1486r 13 3 and and CCONJ 7m01bk1486r 13 4 signal signal NOUN 7m01bk1486r 13 5 transmission transmission NOUN 7m01bk1486r 13 6 are be AUX 7m01bk1486r 13 7 demonstrated demonstrate VERB 7m01bk1486r 13 8 for for ADP 7m01bk1486r 13 9 multiple multiple ADJ 7m01bk1486r 13 10 receiving receiving NOUN 7m01bk1486r 13 11 coils coil NOUN 7m01bk1486r 13 12 with with ADP 7m01bk1486r 13 13 frequency frequency NOUN 7m01bk1486r 13 14 - - PUNCT 7m01bk1486r 13 15 multiplexed multiplexed ADJ 7m01bk1486r 13 16 input input NOUN 7m01bk1486r 13 17 . . PUNCT 7m01bk1486r 14 1 a a DET 7m01bk1486r 14 2 dual dual ADJ 7m01bk1486r 14 3 - - PUNCT 7m01bk1486r 14 4 coil coil NOUN 7m01bk1486r 14 5 fabrication fabrication NOUN 7m01bk1486r 14 6 process process NOUN 7m01bk1486r 14 7 with with ADP 7m01bk1486r 14 8 electroplated electroplate VERB 7m01bk1486r 14 9 through through ADP 7m01bk1486r 14 10 - - PUNCT 7m01bk1486r 14 11 wafer wafer NOUN 7m01bk1486r 14 12 vias via NOUN 7m01bk1486r 14 13 is be AUX 7m01bk1486r 14 14 developed develop VERB 7m01bk1486r 14 15 for for ADP 7m01bk1486r 14 16 future future ADJ 7m01bk1486r 14 17 monolithic monolithic ADJ 7m01bk1486r 14 18 integration integration NOUN 7m01bk1486r 14 19 of of ADP 7m01bk1486r 14 20 coils coil NOUN 7m01bk1486r 14 21 with with ADP 7m01bk1486r 14 22 electronics electronic NOUN 7m01bk1486r 14 23 . . PUNCT 7m01bk1486r 15 1 combining combine VERB 7m01bk1486r 15 2 dual dual ADJ 7m01bk1486r 15 3 coils coil NOUN 7m01bk1486r 15 4 with with ADP 7m01bk1486r 15 5 discrete discrete ADJ 7m01bk1486r 15 6 demodulation demodulation NOUN 7m01bk1486r 15 7 and and CCONJ 7m01bk1486r 15 8 switching switching NOUN 7m01bk1486r 15 9 transistors transistor NOUN 7m01bk1486r 15 10 , , PUNCT 7m01bk1486r 15 11 biphasic biphasic ADJ 7m01bk1486r 15 12 signals signal NOUN 7m01bk1486r 15 13 are be AUX 7m01bk1486r 15 14 generated generate VERB 7m01bk1486r 15 15 across across ADP 7m01bk1486r 15 16 a a DET 7m01bk1486r 15 17 resistor resistor NOUN 7m01bk1486r 15 18 representing represent VERB 7m01bk1486r 15 19 body body NOUN 7m01bk1486r 15 20 tissue tissue NOUN 7m01bk1486r 15 21 . . PUNCT 7m01bk1486r 16 1 the the DET 7m01bk1486r 16 2 above above ADJ 7m01bk1486r 16 3 results result NOUN 7m01bk1486r 16 4 offer offer VERB 7m01bk1486r 16 5 possibilities possibility NOUN 7m01bk1486r 16 6 to to PART 7m01bk1486r 16 7 replace replace VERB 7m01bk1486r 16 8 pulse pulse ADJ 7m01bk1486r 16 9 generators generator NOUN 7m01bk1486r 16 10 with with ADP 7m01bk1486r 16 11 an an DET 7m01bk1486r 16 12 external external ADJ 7m01bk1486r 16 13 unit unit NOUN 7m01bk1486r 16 14 in in ADP 7m01bk1486r 16 15 coordination coordination NOUN 7m01bk1486r 16 16 with with ADP 7m01bk1486r 16 17 implanted implant VERB 7m01bk1486r 16 18 receiving receive VERB 7m01bk1486r 16 19 coils coil NOUN 7m01bk1486r 16 20 and and CCONJ 7m01bk1486r 16 21 circuit circuit NOUN 7m01bk1486r 16 22 components component NOUN 7m01bk1486r 16 23 . . PUNCT