id	sid	tid	token	lemma	pos
mc87pn91q88	1	1	the	the	DET
mc87pn91q88	1	2	first	first	ADJ
mc87pn91q88	1	3	study	study	NOUN
mc87pn91q88	1	4	of	of	ADP
mc87pn91q88	1	5	p	p	NOUN
mc87pn91q88	1	6	-	-	PUNCT
mc87pn91q88	1	7	type	type	NOUN
mc87pn91q88	1	8	doping	doping	NOUN
mc87pn91q88	1	9	in	in	ADP
mc87pn91q88	1	10	gaassb	gaassb	PROPN
mc87pn91q88	1	11	lattice	lattice	ADV
mc87pn91q88	1	12	-	-	PUNCT
mc87pn91q88	1	13	matched	match	VERB
mc87pn91q88	1	14	to	to	ADP
mc87pn91q88	1	15	inp	inp	NOUN
mc87pn91q88	1	16	from	from	ADP
mc87pn91q88	1	17	zn	zn	PROPN
mc87pn91q88	1	18	spin	spin	VERB
mc87pn91q88	1	19	-	-	PUNCT
mc87pn91q88	1	20	on	on	ADP
mc87pn91q88	1	21	glass	glass	NOUN
mc87pn91q88	1	22	sources	source	NOUN
mc87pn91q88	1	23	is	be	AUX
mc87pn91q88	1	24	reported	report	VERB
mc87pn91q88	1	25	.	.	PUNCT
mc87pn91q88	2	1	shallow	shallow	ADJ
mc87pn91q88	2	2	diffusion	diffusion	NOUN
mc87pn91q88	2	3	profiles	profile	NOUN
mc87pn91q88	2	4	suitable	suitable	ADJ
mc87pn91q88	2	5	for	for	ADP
mc87pn91q88	2	6	aggressively	aggressively	ADV
mc87pn91q88	2	7	-	-	PUNCT
mc87pn91q88	2	8	scaled	scale	VERB
mc87pn91q88	2	9	heterojunction	heterojunction	NOUN
mc87pn91q88	2	10	devices	device	NOUN
mc87pn91q88	2	11	and	and	CCONJ
mc87pn91q88	2	12	good	good	ADJ
mc87pn91q88	2	13	electronic	electronic	ADJ
mc87pn91q88	2	14	transport	transport	NOUN
mc87pn91q88	2	15	properties	property	NOUN
mc87pn91q88	2	16	in	in	ADP
mc87pn91q88	2	17	the	the	DET
mc87pn91q88	2	18	doped	dope	VERB
mc87pn91q88	2	19	films	film	NOUN
mc87pn91q88	2	20	have	have	AUX
mc87pn91q88	2	21	been	be	AUX
mc87pn91q88	2	22	observed	observe	VERB
mc87pn91q88	2	23	.	.	PUNCT
mc87pn91q88	3	1	potential	potential	ADJ
mc87pn91q88	3	2	applications	application	NOUN
mc87pn91q88	3	3	for	for	ADP
mc87pn91q88	3	4	spin	spin	NOUN
mc87pn91q88	3	5	-	-	PUNCT
mc87pn91q88	3	6	on	on	ADP
mc87pn91q88	3	7	doping	doping	NOUN
mc87pn91q88	3	8	of	of	ADP
mc87pn91q88	3	9	p	p	NOUN
mc87pn91q88	3	10	-	-	PUNCT
mc87pn91q88	3	11	type	type	NOUN
mc87pn91q88	3	12	gaassb	gaassb	NOUN
mc87pn91q88	3	13	include	include	VERB
mc87pn91q88	3	14	the	the	DET
mc87pn91q88	3	15	optimization	optimization	NOUN
mc87pn91q88	3	16	of	of	ADP
mc87pn91q88	3	17	the	the	DET
mc87pn91q88	3	18	extrinsic	extrinsic	ADJ
mc87pn91q88	3	19	base	base	NOUN
mc87pn91q88	3	20	resistance	resistance	NOUN
mc87pn91q88	3	21	and	and	CCONJ
mc87pn91q88	3	22	the	the	DET
mc87pn91q88	3	23	contact	contact	NOUN
mc87pn91q88	3	24	resistance	resistance	NOUN
mc87pn91q88	3	25	to	to	ADP
mc87pn91q88	3	26	the	the	DET
mc87pn91q88	3	27	base	base	NOUN
mc87pn91q88	3	28	in	in	ADP
mc87pn91q88	3	29	gaassb	gaassb	NOUN
mc87pn91q88	3	30	/	/	SYM
mc87pn91q88	3	31	inp	inp	PROPN
mc87pn91q88	3	32	hbts	hbts	PROPN
mc87pn91q88	3	33	for	for	ADP
mc87pn91q88	3	34	ultra	ultra	ADJ
mc87pn91q88	3	35	-	-	ADJ
mc87pn91q88	3	36	high	high	ADJ
mc87pn91q88	3	37	-	-	PUNCT
mc87pn91q88	3	38	speed	speed	NOUN
mc87pn91q88	3	39	applications	application	NOUN
mc87pn91q88	3	40	,	,	PUNCT
mc87pn91q88	3	41	without	without	ADP
mc87pn91q88	3	42	the	the	DET
mc87pn91q88	3	43	use	use	NOUN
mc87pn91q88	3	44	of	of	ADP
mc87pn91q88	3	45	regrowth	regrowth	NOUN
mc87pn91q88	3	46	or	or	CCONJ
mc87pn91q88	3	47	other	other	ADJ
mc87pn91q88	3	48	complex	complex	ADJ
mc87pn91q88	3	49	processing	processing	NOUN
mc87pn91q88	3	50	.	.	PUNCT
mc87pn91q88	4	1	diffusions	diffusion	NOUN
mc87pn91q88	4	2	were	be	AUX
mc87pn91q88	4	3	carried	carry	VERB
mc87pn91q88	4	4	out	out	ADP
mc87pn91q88	4	5	in	in	ADP
mc87pn91q88	4	6	a	a	DET
mc87pn91q88	4	7	rapid	rapid	ADJ
mc87pn91q88	4	8	thermal	thermal	ADJ
mc87pn91q88	4	9	processor	processor	NOUN
mc87pn91q88	4	10	(	(	PUNCT
mc87pn91q88	4	11	rtp	rtp	NOUN
mc87pn91q88	4	12	)	)	PUNCT
mc87pn91q88	4	13	using	use	VERB
mc87pn91q88	4	14	epitaxial	epitaxial	ADJ
mc87pn91q88	4	15	heterostructures	heterostructure	NOUN
mc87pn91q88	4	16	consisting	consist	VERB
mc87pn91q88	4	17	of	of	ADP
mc87pn91q88	4	18	2000	2000	NUM
mc87pn91q88	4	19	ìé	ìé	NOUN
mc87pn91q88	4	20	of	of	ADP
mc87pn91q88	4	21	p	p	NOUN
mc87pn91q88	4	22	-	-	PUNCT
mc87pn91q88	4	23	type	type	NOUN
mc87pn91q88	4	24	gaas	gaas	NOUN
mc87pn91q88	4	25	0.51sb0.49	0.51sb0.49	NOUN
mc87pn91q88	4	26	grown	grow	VERB
mc87pn91q88	4	27	on	on	ADP
mc87pn91q88	4	28	semi	semi	ADJ
mc87pn91q88	4	29	-	-	ADJ
mc87pn91q88	4	30	insulating	insulating	ADJ
mc87pn91q88	4	31	inp	inp	NOUN
mc87pn91q88	4	32	by	by	ADP
mc87pn91q88	4	33	mocvd	mocvd	PROPN
mc87pn91q88	4	34	.	.	PUNCT
mc87pn91q88	5	1	the	the	DET
mc87pn91q88	5	2	diffusions	diffusion	NOUN
mc87pn91q88	5	3	were	be	AUX
mc87pn91q88	5	4	performed	perform	VERB
mc87pn91q88	5	5	at	at	ADP
mc87pn91q88	5	6	temperatures	temperature	NOUN
mc87pn91q88	5	7	ranging	range	VERB
mc87pn91q88	5	8	from	from	ADP
mc87pn91q88	5	9	350	350	NUM
mc87pn91q88	5	10	-	-	SYM
mc87pn91q88	5	11	625	625	NUM
mc87pn91q88	5	12	å¡c	å¡c	NOUN
mc87pn91q88	5	13	and	and	CCONJ
mc87pn91q88	5	14	diffusion	diffusion	NOUN
mc87pn91q88	5	15	times	time	NOUN
mc87pn91q88	5	16	of	of	ADP
mc87pn91q88	5	17	up	up	ADP
mc87pn91q88	5	18	to	to	PART
mc87pn91q88	5	19	30	30	NUM
mc87pn91q88	5	20	minutes	minute	NOUN
mc87pn91q88	5	21	.	.	PUNCT
mc87pn91q88	6	1	sims	sim	NOUN
mc87pn91q88	6	2	depth	depth	NOUN
mc87pn91q88	6	3	profiling	profiling	NOUN
mc87pn91q88	6	4	indicates	indicate	VERB
mc87pn91q88	6	5	that	that	SCONJ
mc87pn91q88	6	6	zn	zn	PROPN
mc87pn91q88	6	7	starts	start	VERB
mc87pn91q88	6	8	to	to	PART
mc87pn91q88	6	9	diffuse	diffuse	VERB
mc87pn91q88	6	10	into	into	ADP
mc87pn91q88	6	11	gaassb	gaassb	NOUN
mc87pn91q88	6	12	layer	layer	NOUN
mc87pn91q88	6	13	at	at	ADP
mc87pn91q88	6	14	temperatures	temperature	NOUN
mc87pn91q88	6	15	as	as	ADV
mc87pn91q88	6	16	low	low	ADJ
mc87pn91q88	6	17	as	as	ADP
mc87pn91q88	6	18	350	350	NUM
mc87pn91q88	6	19	å¡c	å¡c	NOUN
mc87pn91q88	6	20	,	,	PUNCT
mc87pn91q88	6	21	forming	form	VERB
mc87pn91q88	6	22	very	very	ADV
mc87pn91q88	6	23	shallow	shallow	ADJ
mc87pn91q88	6	24	diffusion	diffusion	NOUN
mc87pn91q88	6	25	profiles	profile	NOUN
mc87pn91q88	6	26	.	.	PUNCT
mc87pn91q88	7	1	for	for	SCONJ
mc87pn91q88	7	2	higher	high	ADJ
mc87pn91q88	7	3	temperatures	temperature	NOUN
mc87pn91q88	7	4	deep	deep	ADJ
mc87pn91q88	7	5	diffusion	diffusion	NOUN
mc87pn91q88	7	6	profiles	profile	NOUN
mc87pn91q88	7	7	extending	extend	VERB
mc87pn91q88	7	8	up	up	ADP
mc87pn91q88	7	9	to	to	PART
mc87pn91q88	7	10	2500	2500	NUM
mc87pn91q88	7	11	ìé	ìé	NOUN
mc87pn91q88	7	12	were	be	AUX
mc87pn91q88	7	13	obtained	obtain	VERB
mc87pn91q88	7	14	.	.	PUNCT
mc87pn91q88	8	1	the	the	DET
mc87pn91q88	8	2	zn	zn	PROPN
mc87pn91q88	8	3	appears	appear	VERB
mc87pn91q88	8	4	to	to	PART
mc87pn91q88	8	5	remain	remain	VERB
mc87pn91q88	8	6	largely	largely	ADV
mc87pn91q88	8	7	electrically	electrically	ADV
mc87pn91q88	8	8	inactive	inactive	ADJ
mc87pn91q88	8	9	for	for	ADP
mc87pn91q88	8	10	diffusions	diffusion	NOUN
mc87pn91q88	8	11	at	at	ADP
mc87pn91q88	8	12	temperatures	temperature	NOUN
mc87pn91q88	8	13	below	below	ADP
mc87pn91q88	8	14	500	500	NUM
mc87pn91q88	8	15	å¡c	å¡c	NOUN
mc87pn91q88	8	16	,	,	PUNCT
mc87pn91q88	8	17	as	as	SCONJ
mc87pn91q88	8	18	indicated	indicate	VERB
mc87pn91q88	8	19	by	by	ADP
mc87pn91q88	8	20	hall	hall	NOUN
mc87pn91q88	8	21	-	-	PUNCT
mc87pn91q88	8	22	effect	effect	NOUN
mc87pn91q88	8	23	measurements	measurement	NOUN
mc87pn91q88	8	24	.	.	PUNCT
mc87pn91q88	9	1	the	the	DET
mc87pn91q88	9	2	threshold	threshold	NOUN
mc87pn91q88	9	3	temperature	temperature	NOUN
mc87pn91q88	9	4	at	at	ADP
mc87pn91q88	9	5	which	which	PRON
mc87pn91q88	9	6	zn	zn	PRON
mc87pn91q88	9	7	starts	start	VERB
mc87pn91q88	9	8	to	to	PART
mc87pn91q88	9	9	become	become	VERB
mc87pn91q88	9	10	electrically	electrically	ADV
mc87pn91q88	9	11	active	active	ADJ
mc87pn91q88	9	12	is	be	AUX
mc87pn91q88	9	13	found	find	VERB
mc87pn91q88	9	14	to	to	PART
mc87pn91q88	9	15	be	be	AUX
mc87pn91q88	9	16	in	in	ADP
mc87pn91q88	9	17	the	the	DET
mc87pn91q88	9	18	range	range	NOUN
mc87pn91q88	9	19	of	of	ADP
mc87pn91q88	9	20	500	500	NUM
mc87pn91q88	9	21	-	-	SYM
mc87pn91q88	9	22	550	550	NUM
mc87pn91q88	9	23	å¡c	å¡c	NOUN
mc87pn91q88	9	24	.	.	PUNCT
mc87pn91q88	10	1	hall	hall	NOUN
mc87pn91q88	10	2	-	-	PUNCT
mc87pn91q88	10	3	effect	effect	NOUN
mc87pn91q88	10	4	measurements	measurement	NOUN
mc87pn91q88	10	5	indicate	indicate	VERB
mc87pn91q88	10	6	that	that	SCONJ
mc87pn91q88	10	7	the	the	DET
mc87pn91q88	10	8	average	average	ADJ
mc87pn91q88	10	9	hole	hole	NOUN
mc87pn91q88	10	10	concentration	concentration	NOUN
mc87pn91q88	10	11	increased	increase	VERB
mc87pn91q88	10	12	by	by	ADP
mc87pn91q88	10	13	almost	almost	ADV
mc87pn91q88	10	14	three	three	NUM
mc87pn91q88	10	15	orders	order	NOUN
mc87pn91q88	10	16	of	of	ADP
mc87pn91q88	10	17	magnitude	magnitude	NOUN
mc87pn91q88	10	18	for	for	ADP
mc87pn91q88	10	19	the	the	DET
mc87pn91q88	10	20	lowest	lowest	ADV
mc87pn91q88	10	21	-	-	PUNCT
mc87pn91q88	10	22	doped	doped	NOUN
mc87pn91q88	10	23	(	(	PUNCT
mc87pn91q88	10	24	2.05e16	2.05e16	NUM
mc87pn91q88	10	25	/cmå	/cmå	PUNCT
mc87pn91q88	10	26	_	_	NOUN
mc87pn91q88	10	27	)	)	PUNCT
mc87pn91q88	10	28	test	test	NOUN
mc87pn91q88	10	29	structure	structure	NOUN
mc87pn91q88	10	30	,	,	PUNCT
mc87pn91q88	10	31	rising	rise	VERB
mc87pn91q88	10	32	from	from	ADP
mc87pn91q88	10	33	2.05e16	2.05e16	NUM
mc87pn91q88	10	34	/cmå	/cmå	PUNCT
mc87pn91q88	11	1	_	_	NOUN
mc87pn91q88	12	1	to	to	ADP
mc87pn91q88	12	2	1.67e19	1.67e19	NUM
mc87pn91q88	12	3	/cmå	/cmå	PUNCT
mc87pn91q88	13	1	_	_	NOUN
mc87pn91q88	13	2	for	for	ADP
mc87pn91q88	13	3	a	a	DET
mc87pn91q88	13	4	30	30	NUM
mc87pn91q88	13	5	minute	minute	NOUN
mc87pn91q88	13	6	,	,	PUNCT
mc87pn91q88	13	7	600	600	NUM
mc87pn91q88	13	8	å¡c	å¡c	NOUN
mc87pn91q88	13	9	diffusion	diffusion	NOUN
mc87pn91q88	13	10	.	.	PUNCT
mc87pn91q88	14	1	the	the	DET
mc87pn91q88	14	2	measured	measured	ADJ
mc87pn91q88	14	3	sheet	sheet	NOUN
mc87pn91q88	14	4	resistance	resistance	NOUN
mc87pn91q88	14	5	decreased	decrease	VERB
mc87pn91q88	14	6	from	from	ADP
mc87pn91q88	14	7	280	280	NUM
mc87pn91q88	14	8	kΩ/sq	kΩ/sq	SPACE
mc87pn91q88	14	9	.	.	PUNCT
mc87pn91q88	15	1	to	to	ADP
mc87pn91q88	15	2	910	910	NUM
mc87pn91q88	15	3	&	&	CCONJ
mc87pn91q88	15	4	#	#	SYM
mc87pn91q88	15	5	937;/sq	937;/sq	NUM
mc87pn91q88	15	6	.	.	PUNCT
mc87pn91q88	15	7	,	,	PUNCT
mc87pn91q88	15	8	while	while	SCONJ
mc87pn91q88	15	9	the	the	DET
mc87pn91q88	15	10	hole	hole	NOUN
mc87pn91q88	15	11	mobility	mobility	NOUN
mc87pn91q88	15	12	was	be	AUX
mc87pn91q88	15	13	reduced	reduce	VERB
mc87pn91q88	15	14	from	from	ADP
mc87pn91q88	15	15	59	59	NUM
mc87pn91q88	15	16	cmå_/vs	cmå_/vs	NUM
mc87pn91q88	15	17	as	as	ADP
mc87pn91q88	15	18	-	-	PUNCT
mc87pn91q88	15	19	grown	grow	VERB
mc87pn91q88	15	20	to	to	ADP
mc87pn91q88	15	21	26	26	NUM
mc87pn91q88	15	22	cmå_/vs	cmå_/vs	NOUN
mc87pn91q88	15	23	due	due	ADP
mc87pn91q88	15	24	to	to	ADP
mc87pn91q88	15	25	increased	increase	VERB
mc87pn91q88	15	26	impurity	impurity	NOUN
mc87pn91q88	15	27	scattering	scattering	NOUN
mc87pn91q88	15	28	.	.	PUNCT
mc87pn91q88	16	1	with	with	ADP
mc87pn91q88	16	2	increase	increase	NOUN
mc87pn91q88	16	3	in	in	ADP
mc87pn91q88	16	4	as	as	ADV
mc87pn91q88	16	5	-	-	PUNCT
mc87pn91q88	16	6	grown	grow	VERB
mc87pn91q88	16	7	background	background	NOUN
mc87pn91q88	16	8	doping	dope	VERB
mc87pn91q88	16	9	concentration	concentration	NOUN
mc87pn91q88	16	10	,	,	PUNCT
mc87pn91q88	16	11	the	the	DET
mc87pn91q88	16	12	diffusion	diffusion	NOUN
mc87pn91q88	16	13	rate	rate	NOUN
mc87pn91q88	16	14	was	be	AUX
mc87pn91q88	16	15	found	find	VERB
mc87pn91q88	16	16	to	to	PART
mc87pn91q88	16	17	increase	increase	VERB
mc87pn91q88	16	18	.	.	PUNCT
mc87pn91q88	17	1	zn	zn	X
mc87pn91q88	17	2	distribution	distribution	NOUN
mc87pn91q88	17	3	profiles	profile	NOUN
mc87pn91q88	17	4	measured	measure	VERB
mc87pn91q88	17	5	by	by	ADP
mc87pn91q88	17	6	sims	sim	NOUN
mc87pn91q88	17	7	were	be	AUX
mc87pn91q88	17	8	modeled	model	VERB
mc87pn91q88	17	9	and	and	CCONJ
mc87pn91q88	17	10	a	a	DET
mc87pn91q88	17	11	mechanism	mechanism	NOUN
mc87pn91q88	17	12	for	for	ADP
mc87pn91q88	17	13	zn	zn	PROPN
mc87pn91q88	17	14	diffusion	diffusion	NOUN
mc87pn91q88	17	15	in	in	ADP
mc87pn91q88	17	16	undoped	undoped	ADJ
mc87pn91q88	17	17	gaas	gaas	NOUN
mc87pn91q88	17	18	0.51sb0.49	0.51sb0.49	NUM
mc87pn91q88	17	19	is	be	AUX
mc87pn91q88	17	20	proposed	propose	VERB
mc87pn91q88	17	21	.	.	PUNCT
mc87pn91q88	18	1	zn	zn	PROPN
mc87pn91q88	18	2	diffuses	diffuse	NOUN
mc87pn91q88	18	3	by	by	ADP
mc87pn91q88	18	4	an	an	DET
mc87pn91q88	18	5	interstitial	interstitial	ADJ
mc87pn91q88	18	6	-	-	PUNCT
mc87pn91q88	18	7	substitutional	substitutional	ADJ
mc87pn91q88	18	8	mechanism	mechanism	NOUN
mc87pn91q88	18	9	in	in	ADP
mc87pn91q88	18	10	the	the	DET
mc87pn91q88	18	11	region	region	NOUN
mc87pn91q88	18	12	close	close	ADV
mc87pn91q88	18	13	to	to	ADP
mc87pn91q88	18	14	the	the	DET
mc87pn91q88	18	15	surface	surface	NOUN
mc87pn91q88	18	16	but	but	CCONJ
mc87pn91q88	18	17	as	as	SCONJ
mc87pn91q88	18	18	it	it	PRON
mc87pn91q88	18	19	moves	move	VERB
mc87pn91q88	18	20	away	away	ADV
mc87pn91q88	18	21	from	from	ADP
mc87pn91q88	18	22	the	the	DET
mc87pn91q88	18	23	surface	surface	NOUN
mc87pn91q88	18	24	and	and	CCONJ
mc87pn91q88	18	25	zn	zn	PROPN
mc87pn91q88	18	26	concentration	concentration	NOUN
mc87pn91q88	18	27	falls	fall	VERB
mc87pn91q88	18	28	down	down	ADV
mc87pn91q88	18	29	,	,	PUNCT
mc87pn91q88	18	30	it	it	PRON
mc87pn91q88	18	31	diffuses	diffuse	VERB
mc87pn91q88	18	32	by	by	ADP
mc87pn91q88	18	33	substitutional	substitutional	ADJ
mc87pn91q88	18	34	mechanism	mechanism	NOUN
mc87pn91q88	18	35	.	.	PUNCT
mc87pn91q88	19	1	surface	surface	NOUN
mc87pn91q88	19	2	diffusivity	diffusivity	NOUN
mc87pn91q88	19	3	of	of	ADP
mc87pn91q88	19	4	1e13	1e13	NUM
mc87pn91q88	19	5	cmå_/s	cmå_/s	PROPN
mc87pn91q88	19	6	at	at	ADP
mc87pn91q88	19	7	600	600	NUM
mc87pn91q88	19	8	å¡c	å¡c	NOUN
mc87pn91q88	19	9	for	for	ADP
mc87pn91q88	19	10	zn	zn	PROPN
mc87pn91q88	19	11	interstitials	interstitial	NOUN
mc87pn91q88	19	12	is	be	AUX
mc87pn91q88	19	13	extracted	extract	VERB
mc87pn91q88	19	14	from	from	ADP
mc87pn91q88	19	15	the	the	DET
mc87pn91q88	19	16	diffusion	diffusion	NOUN
mc87pn91q88	19	17	profiles	profile	NOUN
mc87pn91q88	19	18	.	.	PUNCT
mc87pn91q88	20	1	zn	zn	PROPN
mc87pn91q88	20	2	diffusivity	diffusivity	VERB
mc87pn91q88	20	3	away	away	ADV
mc87pn91q88	20	4	from	from	ADP
mc87pn91q88	20	5	the	the	DET
mc87pn91q88	20	6	surface	surface	NOUN
mc87pn91q88	20	7	is	be	AUX
mc87pn91q88	20	8	found	find	VERB
mc87pn91q88	20	9	to	to	PART
mc87pn91q88	20	10	be	be	AUX
mc87pn91q88	20	11	1.2e14	1.2e14	NUM
mc87pn91q88	20	12	cmå_/s	cmå_/s	NOUN
mc87pn91q88	20	13	at	at	ADP
mc87pn91q88	20	14	600	600	NUM
mc87pn91q88	20	15	å¡c	å¡c	NOUN
mc87pn91q88	20	16	.	.	PUNCT
mc87pn91q88	21	1	there	there	PRON
mc87pn91q88	21	2	is	be	VERB
mc87pn91q88	21	3	insuffcient	insuffcient	ADJ
mc87pn91q88	21	4	evidence	evidence	NOUN
mc87pn91q88	21	5	to	to	PART
mc87pn91q88	21	6	tell	tell	VERB
mc87pn91q88	21	7	whether	whether	SCONJ
mc87pn91q88	21	8	this	this	DET
mc87pn91q88	21	9	diffusivity	diffusivity	NOUN
mc87pn91q88	21	10	is	be	AUX
mc87pn91q88	21	11	that	that	PRON
mc87pn91q88	21	12	of	of	ADP
mc87pn91q88	21	13	substitutional	substitutional	ADJ
mc87pn91q88	21	14	zn	zn	PROPN
mc87pn91q88	21	15	or	or	CCONJ
mc87pn91q88	21	16	of	of	ADP
mc87pn91q88	21	17	a	a	DET
mc87pn91q88	21	18	complex	complex	NOUN
mc87pn91q88	21	19	that	that	PRON
mc87pn91q88	21	20	zn	zn	PROPN
mc87pn91q88	21	21	atoms	atom	NOUN
mc87pn91q88	21	22	form	form	VERB
mc87pn91q88	21	23	with	with	ADP
mc87pn91q88	21	24	the	the	DET
mc87pn91q88	21	25	surrounding	surround	VERB
mc87pn91q88	21	26	defects	defect	NOUN
mc87pn91q88	21	27	.	.	PUNCT