id	sid	tid	token	lemma	pos
mp48sb41j75	1	1	in	in	ADP
mp48sb41j75	1	2	this	this	DET
mp48sb41j75	1	3	thesis	thesis	NOUN
mp48sb41j75	1	4	the	the	DET
mp48sb41j75	1	5	growth	growth	NOUN
mp48sb41j75	1	6	of	of	ADP
mp48sb41j75	1	7	aluminum	aluminum	NOUN
mp48sb41j75	1	8	oxides	oxide	NOUN
mp48sb41j75	1	9	,	,	PUNCT
mp48sb41j75	1	10	specifically	specifically	ADV
mp48sb41j75	1	11	alumina	alumina	PROPN
mp48sb41j75	1	12	,	,	PUNCT
mp48sb41j75	1	13	is	be	AUX
mp48sb41j75	1	14	described	describe	VERB
mp48sb41j75	1	15	.	.	PUNCT
mp48sb41j75	2	1	the	the	DET
mp48sb41j75	2	2	research	research	NOUN
mp48sb41j75	2	3	will	will	AUX
mp48sb41j75	2	4	be	be	AUX
mp48sb41j75	2	5	applied	apply	VERB
mp48sb41j75	2	6	to	to	ADP
mp48sb41j75	2	7	single	single	ADJ
mp48sb41j75	2	8	electron	electron	NOUN
mp48sb41j75	2	9	memories	memory	NOUN
mp48sb41j75	2	10	.	.	PUNCT
mp48sb41j75	3	1	the	the	DET
mp48sb41j75	3	2	aluminum	aluminum	NOUN
mp48sb41j75	3	3	oxides	oxide	NOUN
mp48sb41j75	3	4	are	be	AUX
mp48sb41j75	3	5	grown	grow	VERB
mp48sb41j75	3	6	using	use	VERB
mp48sb41j75	3	7	a	a	DET
mp48sb41j75	3	8	variety	variety	NOUN
mp48sb41j75	3	9	of	of	ADP
mp48sb41j75	3	10	oxygen	oxygen	NOUN
mp48sb41j75	3	11	plasmas	plasma	NOUN
mp48sb41j75	3	12	.	.	PUNCT
mp48sb41j75	4	1	a	a	DET
mp48sb41j75	4	2	variety	variety	NOUN
mp48sb41j75	4	3	of	of	ADP
mp48sb41j75	4	4	experimental	experimental	ADJ
mp48sb41j75	4	5	techniques	technique	NOUN
mp48sb41j75	4	6	and	and	CCONJ
mp48sb41j75	4	7	setups	setup	NOUN
mp48sb41j75	4	8	are	be	AUX
mp48sb41j75	4	9	described	describe	VERB
mp48sb41j75	4	10	and	and	CCONJ
mp48sb41j75	4	11	explained	explain	VERB
mp48sb41j75	4	12	.	.	PUNCT
mp48sb41j75	5	1	preliminary	preliminary	ADJ
mp48sb41j75	5	2	results	result	NOUN
mp48sb41j75	5	3	will	will	AUX
mp48sb41j75	5	4	be	be	AUX
mp48sb41j75	5	5	discussed	discuss	VERB
mp48sb41j75	5	6	as	as	SCONJ
mp48sb41j75	5	7	these	these	PRON
mp48sb41j75	5	8	guided	guide	VERB
mp48sb41j75	5	9	the	the	DET
mp48sb41j75	5	10	changes	change	NOUN
mp48sb41j75	5	11	in	in	ADP
mp48sb41j75	5	12	the	the	DET
mp48sb41j75	5	13	experiments	experiment	NOUN
mp48sb41j75	5	14	.	.	PUNCT
mp48sb41j75	6	1	the	the	DET
mp48sb41j75	6	2	changes	change	NOUN
mp48sb41j75	6	3	in	in	ADP
mp48sb41j75	6	4	setups	setup	NOUN
mp48sb41j75	6	5	will	will	AUX
mp48sb41j75	6	6	then	then	ADV
mp48sb41j75	6	7	be	be	AUX
mp48sb41j75	6	8	discussed	discuss	VERB
mp48sb41j75	6	9	in	in	ADP
mp48sb41j75	6	10	order	order	NOUN
mp48sb41j75	6	11	to	to	PART
mp48sb41j75	6	12	explain	explain	VERB
mp48sb41j75	6	13	the	the	DET
mp48sb41j75	6	14	reasoning	reasoning	NOUN
mp48sb41j75	6	15	behind	behind	ADP
mp48sb41j75	6	16	these	these	DET
mp48sb41j75	6	17	changes	change	NOUN
mp48sb41j75	6	18	,	,	PUNCT
mp48sb41j75	6	19	and	and	CCONJ
mp48sb41j75	6	20	troubleshooting	troubleshooting	NOUN
mp48sb41j75	6	21	of	of	ADP
mp48sb41j75	6	22	the	the	DET
mp48sb41j75	6	23	techniques	technique	NOUN
mp48sb41j75	6	24	is	be	AUX
mp48sb41j75	6	25	described	describe	VERB
mp48sb41j75	6	26	,	,	PUNCT
mp48sb41j75	6	27	and	and	CCONJ
mp48sb41j75	6	28	annotated	annotate	VERB
mp48sb41j75	6	29	.	.	PUNCT
mp48sb41j75	7	1	final	final	ADJ
mp48sb41j75	7	2	setups	setup	NOUN
mp48sb41j75	7	3	and	and	CCONJ
mp48sb41j75	7	4	techniques	technique	NOUN
mp48sb41j75	7	5	are	be	AUX
mp48sb41j75	7	6	shown	show	VERB
mp48sb41j75	7	7	to	to	PART
mp48sb41j75	7	8	allow	allow	VERB
mp48sb41j75	7	9	for	for	ADP
mp48sb41j75	7	10	reproduction	reproduction	NOUN
mp48sb41j75	7	11	.	.	PUNCT
mp48sb41j75	8	1	finally	finally	ADV
mp48sb41j75	8	2	,	,	PUNCT
mp48sb41j75	8	3	the	the	DET
mp48sb41j75	8	4	results	result	NOUN
mp48sb41j75	8	5	of	of	ADP
mp48sb41j75	8	6	the	the	DET
mp48sb41j75	8	7	experiments	experiment	NOUN
mp48sb41j75	8	8	are	be	AUX
mp48sb41j75	8	9	shown	show	VERB
mp48sb41j75	8	10	and	and	CCONJ
mp48sb41j75	8	11	commented	comment	VERB
mp48sb41j75	8	12	on	on	ADP
mp48sb41j75	8	13	.	.	PUNCT
mp48sb41j75	9	1	lastly	lastly	ADV
mp48sb41j75	9	2	,	,	PUNCT
mp48sb41j75	9	3	the	the	DET
mp48sb41j75	9	4	implications	implication	NOUN
mp48sb41j75	9	5	for	for	ADP
mp48sb41j75	9	6	single	single	ADJ
mp48sb41j75	9	7	electron	electron	NOUN
mp48sb41j75	9	8	memories	memory	NOUN
mp48sb41j75	9	9	and	and	CCONJ
mp48sb41j75	9	10	future	future	ADJ
mp48sb41j75	9	11	work	work	NOUN
mp48sb41j75	9	12	are	be	AUX
mp48sb41j75	9	13	discussed	discuss	VERB
mp48sb41j75	9	14	.	.	PUNCT